|
||
The MKS Instruments 647CFour/Eight-channel Mass Flow and Pressure Programmer/Display is afull-rack, multichannel controller which provides both pressure andflow control. Up to eight gas mass flow channels and one pressurechannel allow for independent or ratio-based gas flow control. The onepressure channel and up to four flow channels are displayedsimultaneously on an LCD readout, and are controlled locally from thefront panel or remotely using the analog RS-232 interface.