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167A Readout/Set Point Module -- 167A

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The Type 167A Single Channel Flow Readout is designed to provide complete display and set point control of any MKS mass flow controller (MFC), via front panel controls. Direct display in standard mass flow units (sccm, slm) is easily ccomplished by the proper setting of the front panel precision scaling potentiometer (labeled Gauge Factor). This one-time setting scales the display for the desired process gas, as well as for the appropriate MFC Full Scale range. The three position Open/Close/Flow switch on the front panel is used to operate an MFC according to a set point, or to send a digital low to fully open or fully close the MFC. In most cases, the fully closed position can be used to zero the MFC. A zero pot is conveniently located on the front panel for fine zero adjust of the MFC. The Type 167 readout is used in conjunction with a single MFC and a ± 15 VDC, ±5% power supply. An optional 19 inch rack, and an optional rack with five 167 readouts installed, are available.

Specifications

Display Type Segmented
Character Type Numeric
Package Style
Number of Rows 1.00 #
Number of Characters 1.00 to 4.00 #


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